Acrylic VR Plates - 5-inch Wafer/Large Substrate Carriers - cryspack

Protect your 5" wafers with our advanced acrylic VR plates Wafer/Large Substrate Carriers. Featuring advanced acrylic VR plates, along with custom options and next-generation wafer management.

   

Characteristics

DETAILS*

Wafer VR Plate Features

  1. Full Wafer Vacuum Support: Holds an entire wafer flat and secure across its surface.
  2. Contamination-Controlled: Cleanroom manufactured with low-outgassing materials to protect wafer surfaces.
  3. Durable and Impact-Resistant Material: Made from high-strength plastic with ESD-safe options for safe handling.
  4. Non-Contact, Stress-Free Release: Releases wafers without mechanical stress or residue.
  5. Standard Wafer Sizes: Available for 5″ and 6″ wafers to match common process formats.
  6. Visible: A clear lid lets you inspect the wafer and manage inventory.

 

Wafer VR Plate Applications

  1. Wafer Storage & Transport: Hold 5″ and 6″ wafers flat and secure in transit and storage.
  2. Wafer Process Handling: Move wafers between process steps without surface contact.
  3. Compound Semiconductor Wafers: Suitable for GaAs, SiC and other delicate wafer types.
  4. R&D Wafer Prototyping: Safe handling of experimental and low-volume wafers.
  5. Packaged Wafer & Device Shipping: Protect wafers and wafer-level devices during delivery.

 

Wafer VR Plate Advantages

  1. Superior Wafer Protection: Reliable protection of wafer surfaces from scratches, contamination and static.
  2. Saves time while loading, unloading & transportation: Smooth process of packaging and moving.
  3. Versatile: Applicable to multiple wafer types and semiconductor processes.
  4. Cost-Effective: Reusable and reduces wafer scrap and returns.

    Wafer VR Plate configurations 1. 5 inch and 6 inch sizes based on JEDEC standard 2. Wide range of retention levels: XL, L, M, H, HH 3. A wide range of mesh geometries (16, 33, 76, 103, 137, and 195) 4. Print patterns can be customized  

 

 

Size(inch) 5 / 6 inch
Wafer VR Plate Full-surface release plate + cover + clip
Material / ESD ESD clear or black conductive box + black conductive tray
Mesh size 16,33、76、103、137、195
Print pattern 10*10; 4*30;(Custom grid is acceptable)
Color of gel film Clear
Retention Level XL, L, M, H, HH

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