Acrylic VR Plates - 5-inch Wafer/Large Substrate Carriers - cryspack
Protect your 5" wafers with our advanced acrylic VR plates Wafer/Large Substrate Carriers. Featuring advanced acrylic VR plates, along with custom options and next-generation wafer management.
Characteristics
DETAILS*
Wafer VR Plate Features
- Full Wafer Vacuum Support: Holds an entire wafer flat and secure across its surface.
- Contamination-Controlled: Cleanroom manufactured with low-outgassing materials to protect wafer surfaces.
- Durable and Impact-Resistant Material: Made from high-strength plastic with ESD-safe options for safe handling.
- Non-Contact, Stress-Free Release: Releases wafers without mechanical stress or residue.
- Standard Wafer Sizes: Available for 5″ and 6″ wafers to match common process formats.
- Visible: A clear lid lets you inspect the wafer and manage inventory.
Wafer VR Plate Applications
- Wafer Storage & Transport: Hold 5″ and 6″ wafers flat and secure in transit and storage.
- Wafer Process Handling: Move wafers between process steps without surface contact.
- Compound Semiconductor Wafers: Suitable for GaAs, SiC and other delicate wafer types.
- R&D Wafer Prototyping: Safe handling of experimental and low-volume wafers.
- Packaged Wafer & Device Shipping: Protect wafers and wafer-level devices during delivery.
Wafer VR Plate Advantages
- Superior Wafer Protection: Reliable protection of wafer surfaces from scratches, contamination and static.
- Saves time while loading, unloading & transportation: Smooth process of packaging and moving.
- Versatile: Applicable to multiple wafer types and semiconductor processes.
- Cost-Effective: Reusable and reduces wafer scrap and returns.
Wafer VR Plate configurations 1. 5 inch and 6 inch sizes based on JEDEC standard 2. Wide range of retention levels: XL, L, M, H, HH 3. A wide range of mesh geometries (16, 33, 76, 103, 137, and 195) 4. Print patterns can be customized
| Size(inch) | 5 / 6 inch | |
| Wafer VR Plate | Full-surface release plate + cover + clip | |
| Material / ESD | ESD clear or black conductive box + black conductive tray | |
| Mesh size | 16,33、76、103、137、195 | |
| Print pattern | 10*10; 4*30;(Custom grid is acceptable) | |
| Color of gel film | Clear | |
| Retention Level | XL, L, M, H, HH | |